Electron Microscope

SOLARIS

The most advanced capabilities in nanofabrication for ultimate quality in challenging sample preparation. 


SOLARIS

PRODUCT BROCHURE

SOLARIS brochure

Extraordinary Ultra-High Resolution imaging and extremely precise nanoengineering. Download SOLARIS brochure!

PDF – 6.1 MB

KEY FEATURES

Triglav™ - newly designed UHR electron column

  • - TriLens™ - objective system: a unique combination of three-lens objective and crossover-free beam path
  • - Advanced detection system with multiple SE and BSE detectors - TriSE™ and TriBE™
  • - Triglav™ - Ultimate ultra-high resolution at low beam energy: 0.9 nm at 1 keV and 0.6 nm at 15 keV
  • - Electron beam currents up to 400 nA and rapid beam energy changes
  • - Optimized column geometry for accommodating large wafers up to 8”, 12

Specification

Electron Optics
Electron GunHigh brightness Schottky emitter
Resolution
Standard mode In-Beam SE

0.6nm at 15keV
1.2nm at 1keV

Beam Deceleration Mode

0.9 nm at 1 keV 

Magnification

5 x - 1,000,000 x

Probe Current2 pA to 400 nA

 Orage™ FIB column

High-performance Ga FIB column for ultimate precision in nanoengineering.

  • - Prepare high-quality, ultra-thin TEM lamella from the most advanced semiconductor nodes

    - Easily obtain advanced geometry TEM lamella using  optimized in-situ lift-out geometries and workflows

    - AutoSlicer™ module for semi-automated FIB milling and TEM lamella preparation

    - Gentle FIB thinning for improved quality results in TEM sample preparation

    - Precise end-pointing at low kV for ultra-thin lamella preparation

    - Use low kV, ultra-high resolution imaging for beam sensitive materials or to generate high materials contrast

    - Essence™ easy-to-use modular user interface

Ion Optics

Ion column

Orage™

Ion Gun

Ga LMIS

Resolution

<2.5 nm at 30 Kev (at SEM-FIB coincidence point)

Probe current

1 pA to 100 nA

Accelerating Voltage0.5kV to 30kV

SEM-FIB angle

 55°
 




Application

Semiconductors & Microelectronics

Semiconductors & Microelectronics

Material Science

Material Sciences

Life Sciences

Life Sciences

Earth Sciences

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