Field-free analytical UHR SEM for materials characterization at the nanoscale
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Universality in sample imaging with field-free ultra-high resolution Optics
- - The BrightBeam™ SEM column delivers field-free ultra-high resolution imaging (0.9 nm at 15 keV, 1.3 nm at 1 keV) while maintaining universality in sample imaging and analysis.
- - Excellent imaging performance at low-beam energies ideal for imaging non-conducting samples and uncoated biological specimens. A low vacuum mode is also available.
- High electron beam currents up to 400 nA are advantageous for microanalytical techniques such as CL, EDX, WDX and EBSD.
- - Detection system with angle-selective and energy-filtering capabilities give complete control of surface sensitivity and the option to explore with different contrast.
|Electron Gun||High Brightness Schottky Emitter|
0.9 nm at 15 keV
1.5nm at 1 keV
Beam Deceleration mode
1.3 nm at 1 keV
2x - 1,000,000x
50 eV to 30 keV
2 pA to 400nA
Semiconductors & Microelectronics